3/23/2011	10:12:46 AM	Helium MFC set to  50.000000
3/23/2011	10:12:48 AM	Helium valve opened
3/23/2011	10:22:44 AM	Helium valve closed
3/23/2011	10:22:47 AM	Helium MFC set to  0.000000
3/23/2011	10:23:35 AM	Recipe started at 10:23 AM
3/23/2011	10:23:35 AM	Helium valve closed
3/23/2011	10:23:35 AM	BCl3 valve closed
3/23/2011	10:23:35 AM	PH3 valve closed
3/23/2011	10:23:35 AM	SiCl4 pre valve closed
3/23/2011	10:23:35 AM	SiCl4 post valve closed
3/23/2011	10:23:35 AM	Main Vac valve closed
3/23/2011	10:23:35 AM	Bypass valve closed
3/23/2011	10:23:35 AM	Bubbler valve closed
3/23/2011	10:23:35 AM	H2 valve opened
3/23/2011	10:23:35 AM	Helium MFC set to  0.000000
3/23/2011	10:23:35 AM	H2 MFC set to  500.000000
3/23/2011	10:23:35 AM	BCl3 MFC set to  0.000000
3/23/2011	10:23:35 AM	PHl3 MFC set to  0.000000
3/23/2011	10:23:35 AM	SiCl4 MFC set to  0.000000
3/23/2011	10:23:35 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	10:23:35 AM	Tube furnace set to 0
3/23/2011	10:24:57 AM	Helium valve closed
3/23/2011	10:24:57 AM	BCl3 valve closed
3/23/2011	10:24:57 AM	PH3 valve closed
3/23/2011	10:24:57 AM	SiCl4 pre valve closed
3/23/2011	10:24:57 AM	SiCl4 post valve closed
3/23/2011	10:24:57 AM	Main Vac valve closed
3/23/2011	10:24:57 AM	Bypass valve closed
3/23/2011	10:24:57 AM	H2 valve opened
3/23/2011	10:24:57 AM	Bubbler valve opened
3/23/2011	10:24:57 AM	Helium MFC set to  0.000000
3/23/2011	10:24:57 AM	H2 MFC set to  500.000000
3/23/2011	10:24:57 AM	BCl3 MFC set to  0.000000
3/23/2011	10:24:57 AM	PHl3 MFC set to  0.000000
3/23/2011	10:24:57 AM	SiCl4 MFC set to  0.000000
3/23/2011	10:24:57 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	10:24:57 AM	Tube furnace set to 1000
3/23/2011	10:44:57 AM	Helium valve closed
3/23/2011	10:44:57 AM	PH3 valve closed
3/23/2011	10:44:57 AM	Main Vac valve closed
3/23/2011	10:44:57 AM	Bypass valve closed
3/23/2011	10:44:57 AM	H2 valve opened
3/23/2011	10:44:57 AM	BCl3 valve opened
3/23/2011	10:44:58 AM	SiCl4 pre valve opened
3/23/2011	10:44:58 AM	SiCl4 post valve opened
3/23/2011	10:44:58 AM	Bubbler valve opened
3/23/2011	10:44:58 AM	Helium MFC set to  0.000000
3/23/2011	10:44:58 AM	H2 MFC set to  500.000000
3/23/2011	10:44:58 AM	BCl3 MFC set to  12.000000
3/23/2011	10:44:58 AM	PHl3 MFC set to  0.000000
3/23/2011	10:44:58 AM	SiCl4 MFC set to  50.000000
3/23/2011	10:44:58 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	10:44:58 AM	Tube furnace set to 1000
3/23/2011	11:04:58 AM	H2 valve closed
3/23/2011	11:04:58 AM	BCl3 valve closed
3/23/2011	11:04:58 AM	PH3 valve closed
3/23/2011	11:04:58 AM	SiCl4 pre valve closed
3/23/2011	11:04:58 AM	SiCl4 post valve closed
3/23/2011	11:04:58 AM	Main Vac valve closed
3/23/2011	11:04:58 AM	Bypass valve closed
3/23/2011	11:04:58 AM	Helium valve opened
3/23/2011	11:04:58 AM	Bubbler valve opened
3/23/2011	11:04:58 AM	Helium MFC set to  500.000000
3/23/2011	11:04:58 AM	H2 MFC set to  0.000000
3/23/2011	11:04:58 AM	BCl3 MFC set to  0.000000
3/23/2011	11:04:58 AM	PHl3 MFC set to  0.000000
3/23/2011	11:04:58 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:04:58 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:04:58 AM	Tube furnace set to 0
3/23/2011	11:24:58 AM	Helium valve closed
3/23/2011	11:24:58 AM	H2 valve closed
3/23/2011	11:24:58 AM	BCl3 valve closed
3/23/2011	11:24:58 AM	PH3 valve closed
3/23/2011	11:24:58 AM	SiCl4 pre valve closed
3/23/2011	11:24:58 AM	SiCl4 post valve closed
3/23/2011	11:24:58 AM	Main Vac valve closed
3/23/2011	11:24:58 AM	Bypass valve closed
3/23/2011	11:24:58 AM	Bubbler valve closed
3/23/2011	11:24:58 AM	Helium MFC set to  0.000000
3/23/2011	11:24:58 AM	H2 MFC set to  0.000000
3/23/2011	11:24:58 AM	BCl3 MFC set to  0.000000
3/23/2011	11:24:58 AM	PHl3 MFC set to  0.000000
3/23/2011	11:24:58 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:24:58 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:24:58 AM	Tube furnace set to 0
3/23/2011	11:24:58 AM	Run finished at 11:24 AM
3/23/2011	11:41:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2011	11:41:27 AM	Recipe started at 11:41 AM
3/23/2011	11:41:27 AM	Helium valve closed
3/23/2011	11:41:27 AM	H2 valve closed
3/23/2011	11:41:27 AM	BCl3 valve closed
3/23/2011	11:41:27 AM	PH3 valve closed
3/23/2011	11:41:27 AM	SiCl4 pre valve closed
3/23/2011	11:41:27 AM	SiCl4 post valve closed
3/23/2011	11:41:27 AM	Main Vac valve closed
3/23/2011	11:41:27 AM	Bubbler valve closed
3/23/2011	11:41:27 AM	Bypass valve opened
3/23/2011	11:41:27 AM	Helium MFC set to  0.000000
3/23/2011	11:41:27 AM	H2 MFC set to  0.000000
3/23/2011	11:41:27 AM	BCl3 MFC set to  0.000000
3/23/2011	11:41:27 AM	PHl3 MFC set to  0.000000
3/23/2011	11:41:27 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:41:27 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:41:27 AM	Tube furnace set to 0
3/23/2011	11:41:59 AM	Helium valve closed
3/23/2011	11:41:59 AM	H2 valve closed
3/23/2011	11:41:59 AM	BCl3 valve closed
3/23/2011	11:41:59 AM	PH3 valve closed
3/23/2011	11:41:59 AM	SiCl4 pre valve closed
3/23/2011	11:41:59 AM	SiCl4 post valve closed
3/23/2011	11:41:59 AM	Bubbler valve closed
3/23/2011	11:41:59 AM	Main Vac valve opened
3/23/2011	11:41:59 AM	Bypass valve opened
3/23/2011	11:41:59 AM	Helium MFC set to  0.000000
3/23/2011	11:41:59 AM	H2 MFC set to  0.000000
3/23/2011	11:41:59 AM	BCl3 MFC set to  0.000000
3/23/2011	11:41:59 AM	PHl3 MFC set to  0.000000
3/23/2011	11:41:59 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:41:59 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:41:59 AM	Tube furnace set to 0
3/23/2011	11:41:59 AM	Run finished at 11:41 AM
3/23/2011	11:41:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2011	11:44:51 AM	Helium MFC set to  50.000000
3/23/2011	11:44:52 AM	Helium valve opened
3/23/2011	11:46:06 AM	Helium MFC set to  0.000000
3/23/2011	11:46:07 AM	Helium valve closed
3/23/2011	11:46:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/23/2011	11:46:39 AM	Recipe started at 11:46 AM
3/23/2011	11:46:39 AM	Helium valve closed
3/23/2011	11:46:39 AM	H2 valve closed
3/23/2011	11:46:39 AM	BCl3 valve closed
3/23/2011	11:46:39 AM	PH3 valve closed
3/23/2011	11:46:39 AM	SiCl4 pre valve closed
3/23/2011	11:46:39 AM	SiCl4 post valve closed
3/23/2011	11:46:39 AM	Main Vac valve closed
3/23/2011	11:46:39 AM	Bubbler valve closed
3/23/2011	11:46:39 AM	Bypass valve opened
3/23/2011	11:46:39 AM	Helium MFC set to  0.000000
3/23/2011	11:46:39 AM	H2 MFC set to  0.000000
3/23/2011	11:46:39 AM	BCl3 MFC set to  0.000000
3/23/2011	11:46:39 AM	PHl3 MFC set to  0.000000
3/23/2011	11:46:39 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:46:39 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:46:39 AM	Tube furnace set to 0
3/23/2011	11:46:40 AM	Helium valve closed
3/23/2011	11:46:40 AM	H2 valve closed
3/23/2011	11:46:40 AM	BCl3 valve closed
3/23/2011	11:46:40 AM	PH3 valve closed
3/23/2011	11:46:40 AM	SiCl4 pre valve closed
3/23/2011	11:46:40 AM	SiCl4 post valve closed
3/23/2011	11:46:40 AM	Bubbler valve closed
3/23/2011	11:46:40 AM	Main Vac valve opened
3/23/2011	11:46:40 AM	Bypass valve opened
3/23/2011	11:46:40 AM	Helium MFC set to  0.000000
3/23/2011	11:46:40 AM	H2 MFC set to  0.000000
3/23/2011	11:46:40 AM	BCl3 MFC set to  0.000000
3/23/2011	11:46:40 AM	PHl3 MFC set to  0.000000
3/23/2011	11:46:40 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:46:40 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:46:40 AM	Tube furnace set to 0
3/23/2011	11:47:40 AM	H2 valve closed
3/23/2011	11:47:40 AM	BCl3 valve closed
3/23/2011	11:47:40 AM	PH3 valve closed
3/23/2011	11:47:40 AM	SiCl4 pre valve closed
3/23/2011	11:47:40 AM	SiCl4 post valve closed
3/23/2011	11:47:40 AM	Bubbler valve closed
3/23/2011	11:47:40 AM	Helium valve opened
3/23/2011	11:47:40 AM	Main Vac valve opened
3/23/2011	11:47:40 AM	Bypass valve opened
3/23/2011	11:47:40 AM	Helium MFC set to  100.000000
3/23/2011	11:47:40 AM	H2 MFC set to  0.000000
3/23/2011	11:47:40 AM	BCl3 MFC set to  0.000000
3/23/2011	11:47:40 AM	PHl3 MFC set to  0.000000
3/23/2011	11:47:40 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:47:40 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:47:40 AM	Tube furnace set to 0
3/23/2011	11:48:40 AM	Helium valve closed
3/23/2011	11:48:40 AM	H2 valve closed
3/23/2011	11:48:40 AM	BCl3 valve closed
3/23/2011	11:48:40 AM	PH3 valve closed
3/23/2011	11:48:40 AM	SiCl4 pre valve closed
3/23/2011	11:48:40 AM	SiCl4 post valve closed
3/23/2011	11:48:40 AM	Bubbler valve closed
3/23/2011	11:48:40 AM	Main Vac valve opened
3/23/2011	11:48:40 AM	Bypass valve opened
3/23/2011	11:48:40 AM	Helium MFC set to  0.000000
3/23/2011	11:48:40 AM	H2 MFC set to  0.000000
3/23/2011	11:48:40 AM	BCl3 MFC set to  0.000000
3/23/2011	11:48:40 AM	PHl3 MFC set to  0.000000
3/23/2011	11:48:40 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:48:40 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:48:40 AM	Tube furnace set to 0
3/23/2011	11:49:40 AM	H2 valve closed
3/23/2011	11:49:40 AM	BCl3 valve closed
3/23/2011	11:49:40 AM	PH3 valve closed
3/23/2011	11:49:40 AM	SiCl4 pre valve closed
3/23/2011	11:49:40 AM	SiCl4 post valve closed
3/23/2011	11:49:40 AM	Bubbler valve closed
3/23/2011	11:49:40 AM	Helium valve opened
3/23/2011	11:49:40 AM	Main Vac valve opened
3/23/2011	11:49:40 AM	Bypass valve opened
3/23/2011	11:49:40 AM	Helium MFC set to  100.000000
3/23/2011	11:49:40 AM	H2 MFC set to  0.000000
3/23/2011	11:49:40 AM	BCl3 MFC set to  0.000000
3/23/2011	11:49:40 AM	PHl3 MFC set to  0.000000
3/23/2011	11:49:40 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:49:40 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:49:40 AM	Tube furnace set to 0
3/23/2011	11:50:40 AM	Helium valve closed
3/23/2011	11:50:40 AM	H2 valve closed
3/23/2011	11:50:40 AM	BCl3 valve closed
3/23/2011	11:50:40 AM	PH3 valve closed
3/23/2011	11:50:40 AM	SiCl4 pre valve closed
3/23/2011	11:50:40 AM	SiCl4 post valve closed
3/23/2011	11:50:40 AM	Bubbler valve closed
3/23/2011	11:50:40 AM	Main Vac valve opened
3/23/2011	11:50:41 AM	Bypass valve opened
3/23/2011	11:50:41 AM	Helium MFC set to  0.000000
3/23/2011	11:50:41 AM	H2 MFC set to  0.000000
3/23/2011	11:50:41 AM	BCl3 MFC set to  0.000000
3/23/2011	11:50:41 AM	PHl3 MFC set to  0.000000
3/23/2011	11:50:41 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:50:41 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:50:41 AM	Tube furnace set to 0
3/23/2011	11:51:41 AM	H2 valve closed
3/23/2011	11:51:41 AM	BCl3 valve closed
3/23/2011	11:51:41 AM	PH3 valve closed
3/23/2011	11:51:41 AM	SiCl4 pre valve closed
3/23/2011	11:51:41 AM	SiCl4 post valve closed
3/23/2011	11:51:41 AM	Bubbler valve closed
3/23/2011	11:51:41 AM	Helium valve opened
3/23/2011	11:51:41 AM	Main Vac valve opened
3/23/2011	11:51:41 AM	Bypass valve opened
3/23/2011	11:51:41 AM	Helium MFC set to  100.000000
3/23/2011	11:51:41 AM	H2 MFC set to  0.000000
3/23/2011	11:51:41 AM	BCl3 MFC set to  0.000000
3/23/2011	11:51:41 AM	PHl3 MFC set to  0.000000
3/23/2011	11:51:41 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:51:41 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:51:41 AM	Tube furnace set to 0
3/23/2011	11:52:41 AM	Helium valve closed
3/23/2011	11:52:41 AM	H2 valve closed
3/23/2011	11:52:41 AM	BCl3 valve closed
3/23/2011	11:52:41 AM	PH3 valve closed
3/23/2011	11:52:41 AM	SiCl4 pre valve closed
3/23/2011	11:52:41 AM	SiCl4 post valve closed
3/23/2011	11:52:41 AM	Bubbler valve closed
3/23/2011	11:52:41 AM	Main Vac valve opened
3/23/2011	11:52:41 AM	Bypass valve opened
3/23/2011	11:52:41 AM	Helium MFC set to  0.000000
3/23/2011	11:52:41 AM	H2 MFC set to  0.000000
3/23/2011	11:52:41 AM	BCl3 MFC set to  0.000000
3/23/2011	11:52:41 AM	PHl3 MFC set to  0.000000
3/23/2011	11:52:41 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:52:41 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:52:41 AM	Tube furnace set to 0
3/23/2011	11:53:41 AM	H2 valve closed
3/23/2011	11:53:41 AM	BCl3 valve closed
3/23/2011	11:53:41 AM	PH3 valve closed
3/23/2011	11:53:41 AM	SiCl4 pre valve closed
3/23/2011	11:53:41 AM	SiCl4 post valve closed
3/23/2011	11:53:41 AM	Bubbler valve closed
3/23/2011	11:53:41 AM	Helium valve opened
3/23/2011	11:53:41 AM	Main Vac valve opened
3/23/2011	11:53:41 AM	Bypass valve opened
3/23/2011	11:53:41 AM	Helium MFC set to  100.000000
3/23/2011	11:53:41 AM	H2 MFC set to  0.000000
3/23/2011	11:53:41 AM	BCl3 MFC set to  0.000000
3/23/2011	11:53:41 AM	PHl3 MFC set to  0.000000
3/23/2011	11:53:41 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:53:41 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:53:41 AM	Tube furnace set to 0
3/23/2011	11:54:41 AM	Helium valve closed
3/23/2011	11:54:41 AM	H2 valve closed
3/23/2011	11:54:41 AM	BCl3 valve closed
3/23/2011	11:54:41 AM	PH3 valve closed
3/23/2011	11:54:41 AM	SiCl4 pre valve closed
3/23/2011	11:54:41 AM	SiCl4 post valve closed
3/23/2011	11:54:41 AM	Bubbler valve closed
3/23/2011	11:54:41 AM	Main Vac valve opened
3/23/2011	11:54:41 AM	Bypass valve opened
3/23/2011	11:54:41 AM	Helium MFC set to  0.000000
3/23/2011	11:54:41 AM	H2 MFC set to  0.000000
3/23/2011	11:54:41 AM	BCl3 MFC set to  0.000000
3/23/2011	11:54:41 AM	PHl3 MFC set to  0.000000
3/23/2011	11:54:41 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:54:41 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:54:41 AM	Tube furnace set to 0
3/23/2011	11:55:41 AM	H2 valve closed
3/23/2011	11:55:41 AM	BCl3 valve closed
3/23/2011	11:55:41 AM	PH3 valve closed
3/23/2011	11:55:41 AM	SiCl4 pre valve closed
3/23/2011	11:55:41 AM	SiCl4 post valve closed
3/23/2011	11:55:41 AM	Bubbler valve closed
3/23/2011	11:55:41 AM	Helium valve opened
3/23/2011	11:55:41 AM	Main Vac valve opened
3/23/2011	11:55:41 AM	Bypass valve opened
3/23/2011	11:55:41 AM	Helium MFC set to  100.000000
3/23/2011	11:55:41 AM	H2 MFC set to  0.000000
3/23/2011	11:55:41 AM	BCl3 MFC set to  0.000000
3/23/2011	11:55:41 AM	PHl3 MFC set to  0.000000
3/23/2011	11:55:41 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:55:41 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:55:42 AM	Tube furnace set to 0
3/23/2011	11:56:42 AM	Helium valve closed
3/23/2011	11:56:42 AM	H2 valve closed
3/23/2011	11:56:42 AM	BCl3 valve closed
3/23/2011	11:56:42 AM	PH3 valve closed
3/23/2011	11:56:42 AM	SiCl4 pre valve closed
3/23/2011	11:56:42 AM	SiCl4 post valve closed
3/23/2011	11:56:42 AM	Bubbler valve closed
3/23/2011	11:56:42 AM	Main Vac valve opened
3/23/2011	11:56:42 AM	Bypass valve opened
3/23/2011	11:56:42 AM	Helium MFC set to  0.000000
3/23/2011	11:56:42 AM	H2 MFC set to  0.000000
3/23/2011	11:56:42 AM	BCl3 MFC set to  0.000000
3/23/2011	11:56:42 AM	PHl3 MFC set to  0.000000
3/23/2011	11:56:42 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:56:42 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:56:42 AM	Tube furnace set to 0
3/23/2011	11:57:42 AM	H2 valve closed
3/23/2011	11:57:42 AM	BCl3 valve closed
3/23/2011	11:57:42 AM	PH3 valve closed
3/23/2011	11:57:42 AM	SiCl4 pre valve closed
3/23/2011	11:57:42 AM	SiCl4 post valve closed
3/23/2011	11:57:42 AM	Bubbler valve closed
3/23/2011	11:57:42 AM	Helium valve opened
3/23/2011	11:57:42 AM	Main Vac valve opened
3/23/2011	11:57:42 AM	Bypass valve opened
3/23/2011	11:57:42 AM	Helium MFC set to  100.000000
3/23/2011	11:57:42 AM	H2 MFC set to  0.000000
3/23/2011	11:57:42 AM	BCl3 MFC set to  0.000000
3/23/2011	11:57:42 AM	PHl3 MFC set to  0.000000
3/23/2011	11:57:42 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:57:42 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:57:42 AM	Tube furnace set to 0
3/23/2011	11:58:42 AM	Helium valve closed
3/23/2011	11:58:42 AM	H2 valve closed
3/23/2011	11:58:42 AM	BCl3 valve closed
3/23/2011	11:58:42 AM	PH3 valve closed
3/23/2011	11:58:42 AM	SiCl4 pre valve closed
3/23/2011	11:58:42 AM	SiCl4 post valve closed
3/23/2011	11:58:42 AM	Bubbler valve closed
3/23/2011	11:58:42 AM	Main Vac valve opened
3/23/2011	11:58:42 AM	Bypass valve opened
3/23/2011	11:58:42 AM	Helium MFC set to  0.000000
3/23/2011	11:58:42 AM	H2 MFC set to  0.000000
3/23/2011	11:58:42 AM	BCl3 MFC set to  0.000000
3/23/2011	11:58:42 AM	PHl3 MFC set to  0.000000
3/23/2011	11:58:42 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:58:42 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:58:42 AM	Tube furnace set to 0
3/23/2011	11:59:42 AM	H2 valve closed
3/23/2011	11:59:42 AM	BCl3 valve closed
3/23/2011	11:59:42 AM	PH3 valve closed
3/23/2011	11:59:42 AM	SiCl4 pre valve closed
3/23/2011	11:59:42 AM	SiCl4 post valve closed
3/23/2011	11:59:42 AM	Bubbler valve closed
3/23/2011	11:59:42 AM	Helium valve opened
3/23/2011	11:59:42 AM	Main Vac valve opened
3/23/2011	11:59:42 AM	Bypass valve opened
3/23/2011	11:59:42 AM	Helium MFC set to  100.000000
3/23/2011	11:59:42 AM	H2 MFC set to  0.000000
3/23/2011	11:59:42 AM	BCl3 MFC set to  0.000000
3/23/2011	11:59:42 AM	PHl3 MFC set to  0.000000
3/23/2011	11:59:42 AM	SiCl4 MFC set to  0.000000
3/23/2011	11:59:42 AM	Bypass solenoid MFC set to  0.000000
3/23/2011	11:59:42 AM	Tube furnace set to 0
3/23/2011	12:00:42 PM	Helium valve closed
3/23/2011	12:00:42 PM	H2 valve closed
3/23/2011	12:00:42 PM	BCl3 valve closed
3/23/2011	12:00:42 PM	PH3 valve closed
3/23/2011	12:00:42 PM	SiCl4 pre valve closed
3/23/2011	12:00:42 PM	SiCl4 post valve closed
3/23/2011	12:00:42 PM	Bubbler valve closed
3/23/2011	12:00:42 PM	Main Vac valve opened
3/23/2011	12:00:42 PM	Bypass valve opened
3/23/2011	12:00:42 PM	Helium MFC set to  0.000000
3/23/2011	12:00:42 PM	H2 MFC set to  0.000000
3/23/2011	12:00:42 PM	BCl3 MFC set to  0.000000
3/23/2011	12:00:42 PM	PHl3 MFC set to  0.000000
3/23/2011	12:00:42 PM	SiCl4 MFC set to  0.000000
3/23/2011	12:00:42 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	12:00:43 PM	Tube furnace set to 0
3/23/2011	12:01:43 PM	H2 valve closed
3/23/2011	12:01:43 PM	BCl3 valve closed
3/23/2011	12:01:43 PM	PH3 valve closed
3/23/2011	12:01:43 PM	SiCl4 pre valve closed
3/23/2011	12:01:43 PM	SiCl4 post valve closed
3/23/2011	12:01:43 PM	Bubbler valve closed
3/23/2011	12:01:43 PM	Helium valve opened
3/23/2011	12:01:43 PM	Main Vac valve opened
3/23/2011	12:01:43 PM	Bypass valve opened
3/23/2011	12:01:43 PM	Helium MFC set to  100.000000
3/23/2011	12:01:43 PM	H2 MFC set to  0.000000
3/23/2011	12:01:43 PM	BCl3 MFC set to  0.000000
3/23/2011	12:01:43 PM	PHl3 MFC set to  0.000000
3/23/2011	12:01:43 PM	SiCl4 MFC set to  0.000000
3/23/2011	12:01:43 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	12:01:43 PM	Tube furnace set to 0
3/23/2011	12:02:36 PM	Run aborted at 12:02 PM
3/23/2011	12:02:36 PM	Helium valve closed
3/23/2011	12:02:36 PM	H2 valve closed
3/23/2011	12:02:36 PM	BCl3 valve closed
3/23/2011	12:02:36 PM	PH3 valve closed
3/23/2011	12:02:36 PM	SiCl4 pre valve closed
3/23/2011	12:02:36 PM	SiCl4 post valve closed
3/23/2011	12:02:36 PM	Bypass valve closed
3/23/2011	12:02:36 PM	Main Vac valve closed
3/23/2011	12:02:36 PM	Bubbler valve closed
3/23/2011	12:02:36 PM	Helium MFC set to  0.000000
3/23/2011	12:02:36 PM	H2 MFC set to  0.000000
3/23/2011	12:02:36 PM	BCl3 MFC set to  0.000000
3/23/2011	12:02:36 PM	PHl3 MFC set to  0.000000
3/23/2011	12:02:36 PM	SiCl4 MFC set to  0.000000
3/23/2011	12:02:37 PM	Tube furnace set to 0
3/23/2011	12:02:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/23/2011	12:02:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2011	12:02:37 PM	Recipe started at 12:02 PM
3/23/2011	12:02:37 PM	Helium valve closed
3/23/2011	12:02:37 PM	H2 valve closed
3/23/2011	12:02:37 PM	BCl3 valve closed
3/23/2011	12:02:37 PM	PH3 valve closed
3/23/2011	12:02:37 PM	SiCl4 pre valve closed
3/23/2011	12:02:37 PM	SiCl4 post valve closed
3/23/2011	12:02:37 PM	Main Vac valve closed
3/23/2011	12:02:37 PM	Bubbler valve closed
3/23/2011	12:02:37 PM	Bypass valve opened
3/23/2011	12:02:37 PM	Helium MFC set to  0.000000
3/23/2011	12:02:37 PM	H2 MFC set to  0.000000
3/23/2011	12:02:37 PM	BCl3 MFC set to  0.000000
3/23/2011	12:02:37 PM	PHl3 MFC set to  0.000000
3/23/2011	12:02:37 PM	SiCl4 MFC set to  0.000000
3/23/2011	12:02:37 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	12:02:38 PM	Tube furnace set to 0
3/23/2011	12:02:38 PM	Helium valve closed
3/23/2011	12:02:38 PM	H2 valve closed
3/23/2011	12:02:38 PM	BCl3 valve closed
3/23/2011	12:02:38 PM	PH3 valve closed
3/23/2011	12:02:38 PM	SiCl4 pre valve closed
3/23/2011	12:02:38 PM	SiCl4 post valve closed
3/23/2011	12:02:38 PM	Bubbler valve closed
3/23/2011	12:02:38 PM	Main Vac valve opened
3/23/2011	12:02:38 PM	Bypass valve opened
3/23/2011	12:02:38 PM	Helium MFC set to  0.000000
3/23/2011	12:02:38 PM	H2 MFC set to  0.000000
3/23/2011	12:02:38 PM	BCl3 MFC set to  0.000000
3/23/2011	12:02:38 PM	PHl3 MFC set to  0.000000
3/23/2011	12:02:38 PM	SiCl4 MFC set to  0.000000
3/23/2011	12:02:38 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	12:02:38 PM	Tube furnace set to 0
3/23/2011	12:02:38 PM	Run finished at 12:02 PM
3/23/2011	12:02:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2011	12:03:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/23/2011	12:03:25 PM	Recipe started at 12:03 PM
3/23/2011	12:03:25 PM	Helium valve closed
3/23/2011	12:03:25 PM	H2 valve closed
3/23/2011	12:03:25 PM	BCl3 valve closed
3/23/2011	12:03:25 PM	PH3 valve closed
3/23/2011	12:03:25 PM	SiCl4 pre valve closed
3/23/2011	12:03:25 PM	SiCl4 post valve closed
3/23/2011	12:03:25 PM	Main Vac valve closed
3/23/2011	12:03:25 PM	Bubbler valve closed
3/23/2011	12:03:25 PM	Bypass valve opened
3/23/2011	12:03:25 PM	Helium MFC set to  0.000000
3/23/2011	12:03:25 PM	H2 MFC set to  0.000000
3/23/2011	12:03:25 PM	BCl3 MFC set to  0.000000
3/23/2011	12:03:25 PM	PHl3 MFC set to  0.000000
3/23/2011	12:03:25 PM	SiCl4 MFC set to  0.000000
3/23/2011	12:03:25 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	12:03:26 PM	Tube furnace set to 0
3/23/2011	12:03:26 PM	Helium valve closed
3/23/2011	12:03:26 PM	H2 valve closed
3/23/2011	12:03:26 PM	BCl3 valve closed
3/23/2011	12:03:26 PM	PH3 valve closed
3/23/2011	12:03:26 PM	SiCl4 pre valve closed
3/23/2011	12:03:26 PM	SiCl4 post valve closed
3/23/2011	12:03:26 PM	Bubbler valve closed
3/23/2011	12:03:26 PM	Main Vac valve opened
3/23/2011	12:03:26 PM	Bypass valve opened
3/23/2011	12:03:26 PM	Helium MFC set to  0.000000
3/23/2011	12:03:26 PM	H2 MFC set to  0.000000
3/23/2011	12:03:26 PM	BCl3 MFC set to  0.000000
3/23/2011	12:03:26 PM	PHl3 MFC set to  0.000000
3/23/2011	12:03:26 PM	SiCl4 MFC set to  0.000000
3/23/2011	12:03:26 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	12:03:26 PM	Tube furnace set to 0
3/23/2011	12:04:26 PM	H2 valve closed
3/23/2011	12:04:26 PM	BCl3 valve closed
3/23/2011	12:04:26 PM	PH3 valve closed
3/23/2011	12:04:26 PM	SiCl4 pre valve closed
3/23/2011	12:04:26 PM	SiCl4 post valve closed
3/23/2011	12:04:26 PM	Bubbler valve closed
3/23/2011	12:04:26 PM	Helium valve opened
3/23/2011	12:04:26 PM	Main Vac valve opened
3/23/2011	12:04:26 PM	Bypass valve opened
3/23/2011	12:04:26 PM	Helium MFC set to  100.000000
3/23/2011	12:04:26 PM	H2 MFC set to  0.000000
3/23/2011	12:04:26 PM	BCl3 MFC set to  0.000000
3/23/2011	12:04:26 PM	PHl3 MFC set to  0.000000
3/23/2011	12:04:26 PM	SiCl4 MFC set to  0.000000
3/23/2011	12:04:26 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	12:04:26 PM	Tube furnace set to 0
3/23/2011	12:05:26 PM	Helium valve closed
3/23/2011	12:05:26 PM	H2 valve closed
3/23/2011	12:05:26 PM	BCl3 valve closed
3/23/2011	12:05:26 PM	PH3 valve closed
3/23/2011	12:05:26 PM	SiCl4 pre valve closed
3/23/2011	12:05:26 PM	SiCl4 post valve closed
3/23/2011	12:05:26 PM	Bubbler valve closed
3/23/2011	12:05:26 PM	Main Vac valve opened
3/23/2011	12:05:26 PM	Bypass valve opened
3/23/2011	12:05:26 PM	Helium MFC set to  0.000000
3/23/2011	12:05:26 PM	H2 MFC set to  0.000000
3/23/2011	12:05:26 PM	BCl3 MFC set to  0.000000
3/23/2011	12:05:26 PM	PHl3 MFC set to  0.000000
3/23/2011	12:05:26 PM	SiCl4 MFC set to  0.000000
3/23/2011	12:05:26 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	12:05:26 PM	Tube furnace set to 0
3/23/2011	12:06:26 PM	H2 valve closed
3/23/2011	12:06:26 PM	BCl3 valve closed
3/23/2011	12:06:26 PM	PH3 valve closed
3/23/2011	12:06:26 PM	SiCl4 pre valve closed
3/23/2011	12:06:26 PM	SiCl4 post valve closed
3/23/2011	12:06:26 PM	Bubbler valve closed
3/23/2011	12:06:26 PM	Helium valve opened
3/23/2011	12:06:26 PM	Main Vac valve opened
3/23/2011	12:06:26 PM	Bypass valve opened
3/23/2011	12:06:26 PM	Helium MFC set to  100.000000
3/23/2011	12:06:26 PM	H2 MFC set to  0.000000
3/23/2011	12:06:26 PM	BCl3 MFC set to  0.000000
3/23/2011	12:06:26 PM	PHl3 MFC set to  0.000000
3/23/2011	12:06:26 PM	SiCl4 MFC set to  0.000000
3/23/2011	12:06:26 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	12:06:27 PM	Tube furnace set to 0
3/23/2011	12:06:36 PM	Run aborted at 12:06 PM
3/23/2011	12:06:36 PM	Helium valve closed
3/23/2011	12:06:36 PM	H2 valve closed
3/23/2011	12:06:36 PM	BCl3 valve closed
3/23/2011	12:06:36 PM	PH3 valve closed
3/23/2011	12:06:36 PM	SiCl4 pre valve closed
3/23/2011	12:06:36 PM	SiCl4 post valve closed
3/23/2011	12:06:36 PM	Bypass valve closed
3/23/2011	12:06:36 PM	Main Vac valve closed
3/23/2011	12:06:36 PM	Bubbler valve closed
3/23/2011	12:06:36 PM	Helium MFC set to  0.000000
3/23/2011	12:06:36 PM	H2 MFC set to  0.000000
3/23/2011	12:06:36 PM	BCl3 MFC set to  0.000000
3/23/2011	12:06:36 PM	PHl3 MFC set to  0.000000
3/23/2011	12:06:36 PM	SiCl4 MFC set to  0.000000
3/23/2011	12:06:36 PM	Tube furnace set to 0
3/23/2011	12:06:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/23/2011	12:06:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2011	12:06:37 PM	Recipe started at 12:06 PM
3/23/2011	12:06:37 PM	Helium valve closed
3/23/2011	12:06:37 PM	H2 valve closed
3/23/2011	12:06:37 PM	BCl3 valve closed
3/23/2011	12:06:37 PM	PH3 valve closed
3/23/2011	12:06:37 PM	SiCl4 pre valve closed
3/23/2011	12:06:37 PM	SiCl4 post valve closed
3/23/2011	12:06:37 PM	Main Vac valve closed
3/23/2011	12:06:37 PM	Bubbler valve closed
3/23/2011	12:06:37 PM	Bypass valve opened
3/23/2011	12:06:37 PM	Helium MFC set to  0.000000
3/23/2011	12:06:37 PM	H2 MFC set to  0.000000
3/23/2011	12:06:37 PM	BCl3 MFC set to  0.000000
3/23/2011	12:06:37 PM	PHl3 MFC set to  0.000000
3/23/2011	12:06:37 PM	SiCl4 MFC set to  0.000000
3/23/2011	12:06:37 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	12:06:38 PM	Tube furnace set to 0
3/23/2011	12:06:38 PM	Helium valve closed
3/23/2011	12:06:38 PM	H2 valve closed
3/23/2011	12:06:38 PM	BCl3 valve closed
3/23/2011	12:06:38 PM	PH3 valve closed
3/23/2011	12:06:38 PM	SiCl4 pre valve closed
3/23/2011	12:06:38 PM	SiCl4 post valve closed
3/23/2011	12:06:38 PM	Bubbler valve closed
3/23/2011	12:06:38 PM	Main Vac valve opened
3/23/2011	12:06:38 PM	Bypass valve opened
3/23/2011	12:06:38 PM	Helium MFC set to  0.000000
3/23/2011	12:06:38 PM	H2 MFC set to  0.000000
3/23/2011	12:06:38 PM	BCl3 MFC set to  0.000000
3/23/2011	12:06:38 PM	PHl3 MFC set to  0.000000
3/23/2011	12:06:38 PM	SiCl4 MFC set to  0.000000
3/23/2011	12:06:38 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	12:06:38 PM	Tube furnace set to 0
3/23/2011	12:06:38 PM	Run finished at 12:06 PM
3/23/2011	12:06:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2011	12:07:17 PM	Recipe started at 12:07 PM
3/23/2011	12:07:17 PM	Helium valve closed
3/23/2011	12:07:17 PM	BCl3 valve closed
3/23/2011	12:07:17 PM	PH3 valve closed
3/23/2011	12:07:17 PM	SiCl4 pre valve closed
3/23/2011	12:07:17 PM	SiCl4 post valve closed
3/23/2011	12:07:17 PM	Main Vac valve closed
3/23/2011	12:07:17 PM	Bypass valve closed
3/23/2011	12:07:17 PM	Bubbler valve closed
3/23/2011	12:07:17 PM	H2 valve opened
3/23/2011	12:07:17 PM	Helium MFC set to  0.000000
3/23/2011	12:07:17 PM	H2 MFC set to  500.000000
3/23/2011	12:07:17 PM	BCl3 MFC set to  0.000000
3/23/2011	12:07:17 PM	PHl3 MFC set to  0.000000
3/23/2011	12:07:17 PM	SiCl4 MFC set to  0.000000
3/23/2011	12:07:17 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	12:07:17 PM	Tube furnace set to 0
3/23/2011	12:08:34 PM	Helium valve closed
3/23/2011	12:08:34 PM	BCl3 valve closed
3/23/2011	12:08:34 PM	PH3 valve closed
3/23/2011	12:08:34 PM	SiCl4 pre valve closed
3/23/2011	12:08:34 PM	SiCl4 post valve closed
3/23/2011	12:08:34 PM	Main Vac valve closed
3/23/2011	12:08:34 PM	Bypass valve closed
3/23/2011	12:08:34 PM	H2 valve opened
3/23/2011	12:08:34 PM	Bubbler valve opened
3/23/2011	12:08:34 PM	Helium MFC set to  0.000000
3/23/2011	12:08:34 PM	H2 MFC set to  500.000000
3/23/2011	12:08:34 PM	BCl3 MFC set to  0.000000
3/23/2011	12:08:34 PM	PHl3 MFC set to  0.000000
3/23/2011	12:08:34 PM	SiCl4 MFC set to  0.000000
3/23/2011	12:08:34 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	12:08:35 PM	Tube furnace set to 1000
3/23/2011	12:28:34 PM	Helium valve closed
3/23/2011	12:28:34 PM	PH3 valve closed
3/23/2011	12:28:34 PM	Main Vac valve closed
3/23/2011	12:28:35 PM	Bypass valve closed
3/23/2011	12:28:35 PM	H2 valve opened
3/23/2011	12:28:35 PM	BCl3 valve opened
3/23/2011	12:28:35 PM	SiCl4 pre valve opened
3/23/2011	12:28:35 PM	SiCl4 post valve opened
3/23/2011	12:28:35 PM	Bubbler valve opened
3/23/2011	12:28:35 PM	Helium MFC set to  0.000000
3/23/2011	12:28:35 PM	H2 MFC set to  500.000000
3/23/2011	12:28:35 PM	BCl3 MFC set to  12.000000
3/23/2011	12:28:35 PM	PHl3 MFC set to  0.000000
3/23/2011	12:28:35 PM	SiCl4 MFC set to  50.000000
3/23/2011	12:28:35 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	12:28:35 PM	Tube furnace set to 1000
3/23/2011	12:48:35 PM	H2 valve closed
3/23/2011	12:48:35 PM	BCl3 valve closed
3/23/2011	12:48:35 PM	PH3 valve closed
3/23/2011	12:48:35 PM	SiCl4 pre valve closed
3/23/2011	12:48:35 PM	SiCl4 post valve closed
3/23/2011	12:48:35 PM	Main Vac valve closed
3/23/2011	12:48:35 PM	Bypass valve closed
3/23/2011	12:48:35 PM	Helium valve opened
3/23/2011	12:48:35 PM	Bubbler valve opened
3/23/2011	12:48:35 PM	Helium MFC set to  500.000000
3/23/2011	12:48:35 PM	H2 MFC set to  0.000000
3/23/2011	12:48:35 PM	BCl3 MFC set to  0.000000
3/23/2011	12:48:35 PM	PHl3 MFC set to  0.000000
3/23/2011	12:48:35 PM	SiCl4 MFC set to  0.000000
3/23/2011	12:48:35 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	12:48:35 PM	Tube furnace set to 0
3/23/2011	1:08:35 PM	Helium valve closed
3/23/2011	1:08:35 PM	H2 valve closed
3/23/2011	1:08:35 PM	BCl3 valve closed
3/23/2011	1:08:35 PM	PH3 valve closed
3/23/2011	1:08:35 PM	SiCl4 pre valve closed
3/23/2011	1:08:35 PM	SiCl4 post valve closed
3/23/2011	1:08:35 PM	Main Vac valve closed
3/23/2011	1:08:35 PM	Bypass valve closed
3/23/2011	1:08:35 PM	Bubbler valve closed
3/23/2011	1:08:35 PM	Helium MFC set to  0.000000
3/23/2011	1:08:35 PM	H2 MFC set to  0.000000
3/23/2011	1:08:35 PM	BCl3 MFC set to  0.000000
3/23/2011	1:08:35 PM	PHl3 MFC set to  0.000000
3/23/2011	1:08:35 PM	SiCl4 MFC set to  0.000000
3/23/2011	1:08:35 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	1:08:35 PM	Tube furnace set to 0
3/23/2011	1:08:35 PM	Run finished at 1:08 PM
3/23/2011	2:03:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2011	2:03:43 PM	Recipe started at 2:03 PM
3/23/2011	2:03:43 PM	Helium valve closed
3/23/2011	2:03:43 PM	H2 valve closed
3/23/2011	2:03:43 PM	BCl3 valve closed
3/23/2011	2:03:43 PM	PH3 valve closed
3/23/2011	2:03:43 PM	SiCl4 pre valve closed
3/23/2011	2:03:43 PM	SiCl4 post valve closed
3/23/2011	2:03:43 PM	Main Vac valve closed
3/23/2011	2:03:43 PM	Bubbler valve closed
3/23/2011	2:03:43 PM	Bypass valve opened
3/23/2011	2:03:43 PM	Helium MFC set to  0.000000
3/23/2011	2:03:43 PM	H2 MFC set to  0.000000
3/23/2011	2:03:43 PM	BCl3 MFC set to  0.000000
3/23/2011	2:03:43 PM	PHl3 MFC set to  0.000000
3/23/2011	2:03:43 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:03:43 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:03:43 PM	Tube furnace set to 0
3/23/2011	2:04:16 PM	Helium valve closed
3/23/2011	2:04:16 PM	H2 valve closed
3/23/2011	2:04:16 PM	BCl3 valve closed
3/23/2011	2:04:16 PM	PH3 valve closed
3/23/2011	2:04:16 PM	SiCl4 pre valve closed
3/23/2011	2:04:16 PM	SiCl4 post valve closed
3/23/2011	2:04:16 PM	Bubbler valve closed
3/23/2011	2:04:16 PM	Main Vac valve opened
3/23/2011	2:04:16 PM	Bypass valve opened
3/23/2011	2:04:16 PM	Helium MFC set to  0.000000
3/23/2011	2:04:16 PM	H2 MFC set to  0.000000
3/23/2011	2:04:16 PM	BCl3 MFC set to  0.000000
3/23/2011	2:04:16 PM	PHl3 MFC set to  0.000000
3/23/2011	2:04:16 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:04:16 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:04:16 PM	Tube furnace set to 0
3/23/2011	2:04:17 PM	Run finished at 2:04 PM
3/23/2011	2:04:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2011	2:05:33 PM	Helium MFC set to  50.000000
3/23/2011	2:05:35 PM	Helium valve opened
3/23/2011	2:10:08 PM	Helium MFC set to  0.000000
3/23/2011	2:10:09 PM	Helium valve closed
3/23/2011	2:10:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/23/2011	2:10:39 PM	Recipe started at 2:10 PM
3/23/2011	2:10:39 PM	Helium valve closed
3/23/2011	2:10:39 PM	H2 valve closed
3/23/2011	2:10:39 PM	BCl3 valve closed
3/23/2011	2:10:39 PM	PH3 valve closed
3/23/2011	2:10:39 PM	SiCl4 pre valve closed
3/23/2011	2:10:39 PM	SiCl4 post valve closed
3/23/2011	2:10:39 PM	Main Vac valve closed
3/23/2011	2:10:39 PM	Bubbler valve closed
3/23/2011	2:10:39 PM	Bypass valve opened
3/23/2011	2:10:39 PM	Helium MFC set to  0.000000
3/23/2011	2:10:39 PM	H2 MFC set to  0.000000
3/23/2011	2:10:39 PM	BCl3 MFC set to  0.000000
3/23/2011	2:10:39 PM	PHl3 MFC set to  0.000000
3/23/2011	2:10:39 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:10:39 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:10:40 PM	Tube furnace set to 0
3/23/2011	2:10:40 PM	Helium valve closed
3/23/2011	2:10:40 PM	H2 valve closed
3/23/2011	2:10:40 PM	BCl3 valve closed
3/23/2011	2:10:40 PM	PH3 valve closed
3/23/2011	2:10:40 PM	SiCl4 pre valve closed
3/23/2011	2:10:40 PM	SiCl4 post valve closed
3/23/2011	2:10:40 PM	Bubbler valve closed
3/23/2011	2:10:40 PM	Main Vac valve opened
3/23/2011	2:10:40 PM	Bypass valve opened
3/23/2011	2:10:40 PM	Helium MFC set to  0.000000
3/23/2011	2:10:40 PM	H2 MFC set to  0.000000
3/23/2011	2:10:40 PM	BCl3 MFC set to  0.000000
3/23/2011	2:10:40 PM	PHl3 MFC set to  0.000000
3/23/2011	2:10:40 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:10:40 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:10:40 PM	Tube furnace set to 0
3/23/2011	2:11:40 PM	H2 valve closed
3/23/2011	2:11:40 PM	BCl3 valve closed
3/23/2011	2:11:40 PM	PH3 valve closed
3/23/2011	2:11:40 PM	SiCl4 pre valve closed
3/23/2011	2:11:40 PM	SiCl4 post valve closed
3/23/2011	2:11:40 PM	Bubbler valve closed
3/23/2011	2:11:40 PM	Helium valve opened
3/23/2011	2:11:40 PM	Main Vac valve opened
3/23/2011	2:11:40 PM	Bypass valve opened
3/23/2011	2:11:40 PM	Helium MFC set to  100.000000
3/23/2011	2:11:40 PM	H2 MFC set to  0.000000
3/23/2011	2:11:40 PM	BCl3 MFC set to  0.000000
3/23/2011	2:11:40 PM	PHl3 MFC set to  0.000000
3/23/2011	2:11:40 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:11:40 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:11:40 PM	Tube furnace set to 0
3/23/2011	2:12:40 PM	Helium valve closed
3/23/2011	2:12:40 PM	H2 valve closed
3/23/2011	2:12:40 PM	BCl3 valve closed
3/23/2011	2:12:40 PM	PH3 valve closed
3/23/2011	2:12:40 PM	SiCl4 pre valve closed
3/23/2011	2:12:40 PM	SiCl4 post valve closed
3/23/2011	2:12:40 PM	Bubbler valve closed
3/23/2011	2:12:40 PM	Main Vac valve opened
3/23/2011	2:12:40 PM	Bypass valve opened
3/23/2011	2:12:40 PM	Helium MFC set to  0.000000
3/23/2011	2:12:40 PM	H2 MFC set to  0.000000
3/23/2011	2:12:40 PM	BCl3 MFC set to  0.000000
3/23/2011	2:12:40 PM	PHl3 MFC set to  0.000000
3/23/2011	2:12:40 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:12:40 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:12:40 PM	Tube furnace set to 0
3/23/2011	2:13:40 PM	H2 valve closed
3/23/2011	2:13:40 PM	BCl3 valve closed
3/23/2011	2:13:40 PM	PH3 valve closed
3/23/2011	2:13:40 PM	SiCl4 pre valve closed
3/23/2011	2:13:40 PM	SiCl4 post valve closed
3/23/2011	2:13:40 PM	Bubbler valve closed
3/23/2011	2:13:40 PM	Helium valve opened
3/23/2011	2:13:40 PM	Main Vac valve opened
3/23/2011	2:13:40 PM	Bypass valve opened
3/23/2011	2:13:40 PM	Helium MFC set to  100.000000
3/23/2011	2:13:40 PM	H2 MFC set to  0.000000
3/23/2011	2:13:40 PM	BCl3 MFC set to  0.000000
3/23/2011	2:13:40 PM	PHl3 MFC set to  0.000000
3/23/2011	2:13:40 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:13:40 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:13:41 PM	Tube furnace set to 0
3/23/2011	2:14:41 PM	Helium valve closed
3/23/2011	2:14:41 PM	H2 valve closed
3/23/2011	2:14:41 PM	BCl3 valve closed
3/23/2011	2:14:41 PM	PH3 valve closed
3/23/2011	2:14:41 PM	SiCl4 pre valve closed
3/23/2011	2:14:41 PM	SiCl4 post valve closed
3/23/2011	2:14:41 PM	Bubbler valve closed
3/23/2011	2:14:41 PM	Main Vac valve opened
3/23/2011	2:14:41 PM	Bypass valve opened
3/23/2011	2:14:41 PM	Helium MFC set to  0.000000
3/23/2011	2:14:41 PM	H2 MFC set to  0.000000
3/23/2011	2:14:41 PM	BCl3 MFC set to  0.000000
3/23/2011	2:14:41 PM	PHl3 MFC set to  0.000000
3/23/2011	2:14:41 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:14:41 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:14:41 PM	Tube furnace set to 0
3/23/2011	2:15:41 PM	H2 valve closed
3/23/2011	2:15:41 PM	BCl3 valve closed
3/23/2011	2:15:41 PM	PH3 valve closed
3/23/2011	2:15:41 PM	SiCl4 pre valve closed
3/23/2011	2:15:41 PM	SiCl4 post valve closed
3/23/2011	2:15:41 PM	Bubbler valve closed
3/23/2011	2:15:41 PM	Helium valve opened
3/23/2011	2:15:41 PM	Main Vac valve opened
3/23/2011	2:15:41 PM	Bypass valve opened
3/23/2011	2:15:41 PM	Helium MFC set to  100.000000
3/23/2011	2:15:41 PM	H2 MFC set to  0.000000
3/23/2011	2:15:41 PM	BCl3 MFC set to  0.000000
3/23/2011	2:15:41 PM	PHl3 MFC set to  0.000000
3/23/2011	2:15:41 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:15:41 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:15:41 PM	Tube furnace set to 0
3/23/2011	2:16:41 PM	Helium valve closed
3/23/2011	2:16:41 PM	H2 valve closed
3/23/2011	2:16:41 PM	BCl3 valve closed
3/23/2011	2:16:41 PM	PH3 valve closed
3/23/2011	2:16:41 PM	SiCl4 pre valve closed
3/23/2011	2:16:41 PM	SiCl4 post valve closed
3/23/2011	2:16:41 PM	Bubbler valve closed
3/23/2011	2:16:41 PM	Main Vac valve opened
3/23/2011	2:16:41 PM	Bypass valve opened
3/23/2011	2:16:41 PM	Helium MFC set to  0.000000
3/23/2011	2:16:41 PM	H2 MFC set to  0.000000
3/23/2011	2:16:41 PM	BCl3 MFC set to  0.000000
3/23/2011	2:16:41 PM	PHl3 MFC set to  0.000000
3/23/2011	2:16:41 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:16:41 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:16:41 PM	Tube furnace set to 0
3/23/2011	2:17:41 PM	H2 valve closed
3/23/2011	2:17:41 PM	BCl3 valve closed
3/23/2011	2:17:41 PM	PH3 valve closed
3/23/2011	2:17:41 PM	SiCl4 pre valve closed
3/23/2011	2:17:41 PM	SiCl4 post valve closed
3/23/2011	2:17:41 PM	Bubbler valve closed
3/23/2011	2:17:41 PM	Helium valve opened
3/23/2011	2:17:41 PM	Main Vac valve opened
3/23/2011	2:17:41 PM	Bypass valve opened
3/23/2011	2:17:41 PM	Helium MFC set to  100.000000
3/23/2011	2:17:41 PM	H2 MFC set to  0.000000
3/23/2011	2:17:41 PM	BCl3 MFC set to  0.000000
3/23/2011	2:17:41 PM	PHl3 MFC set to  0.000000
3/23/2011	2:17:41 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:17:41 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:17:41 PM	Tube furnace set to 0
3/23/2011	2:18:41 PM	Helium valve closed
3/23/2011	2:18:41 PM	H2 valve closed
3/23/2011	2:18:41 PM	BCl3 valve closed
3/23/2011	2:18:41 PM	PH3 valve closed
3/23/2011	2:18:41 PM	SiCl4 pre valve closed
3/23/2011	2:18:41 PM	SiCl4 post valve closed
3/23/2011	2:18:41 PM	Bubbler valve closed
3/23/2011	2:18:41 PM	Main Vac valve opened
3/23/2011	2:18:41 PM	Bypass valve opened
3/23/2011	2:18:41 PM	Helium MFC set to  0.000000
3/23/2011	2:18:41 PM	H2 MFC set to  0.000000
3/23/2011	2:18:41 PM	BCl3 MFC set to  0.000000
3/23/2011	2:18:41 PM	PHl3 MFC set to  0.000000
3/23/2011	2:18:41 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:18:41 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:18:42 PM	Tube furnace set to 0
3/23/2011	2:19:42 PM	H2 valve closed
3/23/2011	2:19:42 PM	BCl3 valve closed
3/23/2011	2:19:42 PM	PH3 valve closed
3/23/2011	2:19:42 PM	SiCl4 pre valve closed
3/23/2011	2:19:42 PM	SiCl4 post valve closed
3/23/2011	2:19:42 PM	Bubbler valve closed
3/23/2011	2:19:42 PM	Helium valve opened
3/23/2011	2:19:42 PM	Main Vac valve opened
3/23/2011	2:19:42 PM	Bypass valve opened
3/23/2011	2:19:42 PM	Helium MFC set to  100.000000
3/23/2011	2:19:42 PM	H2 MFC set to  0.000000
3/23/2011	2:19:42 PM	BCl3 MFC set to  0.000000
3/23/2011	2:19:42 PM	PHl3 MFC set to  0.000000
3/23/2011	2:19:42 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:19:42 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:19:42 PM	Tube furnace set to 0
3/23/2011	2:20:42 PM	Helium valve closed
3/23/2011	2:20:42 PM	H2 valve closed
3/23/2011	2:20:42 PM	BCl3 valve closed
3/23/2011	2:20:42 PM	PH3 valve closed
3/23/2011	2:20:42 PM	SiCl4 pre valve closed
3/23/2011	2:20:42 PM	SiCl4 post valve closed
3/23/2011	2:20:42 PM	Bubbler valve closed
3/23/2011	2:20:42 PM	Main Vac valve opened
3/23/2011	2:20:42 PM	Bypass valve opened
3/23/2011	2:20:42 PM	Helium MFC set to  0.000000
3/23/2011	2:20:42 PM	H2 MFC set to  0.000000
3/23/2011	2:20:42 PM	BCl3 MFC set to  0.000000
3/23/2011	2:20:42 PM	PHl3 MFC set to  0.000000
3/23/2011	2:20:42 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:20:42 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:20:42 PM	Tube furnace set to 0
3/23/2011	2:21:42 PM	H2 valve closed
3/23/2011	2:21:42 PM	BCl3 valve closed
3/23/2011	2:21:42 PM	PH3 valve closed
3/23/2011	2:21:42 PM	SiCl4 pre valve closed
3/23/2011	2:21:42 PM	SiCl4 post valve closed
3/23/2011	2:21:42 PM	Bubbler valve closed
3/23/2011	2:21:42 PM	Helium valve opened
3/23/2011	2:21:42 PM	Main Vac valve opened
3/23/2011	2:21:42 PM	Bypass valve opened
3/23/2011	2:21:42 PM	Helium MFC set to  100.000000
3/23/2011	2:21:42 PM	H2 MFC set to  0.000000
3/23/2011	2:21:42 PM	BCl3 MFC set to  0.000000
3/23/2011	2:21:42 PM	PHl3 MFC set to  0.000000
3/23/2011	2:21:42 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:21:42 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:21:42 PM	Tube furnace set to 0
3/23/2011	2:22:16 PM	Run aborted at 2:22 PM
3/23/2011	2:22:16 PM	Helium valve closed
3/23/2011	2:22:16 PM	H2 valve closed
3/23/2011	2:22:16 PM	BCl3 valve closed
3/23/2011	2:22:16 PM	PH3 valve closed
3/23/2011	2:22:16 PM	SiCl4 pre valve closed
3/23/2011	2:22:16 PM	SiCl4 post valve closed
3/23/2011	2:22:16 PM	Bypass valve closed
3/23/2011	2:22:16 PM	Main Vac valve closed
3/23/2011	2:22:16 PM	Bubbler valve closed
3/23/2011	2:22:16 PM	Helium MFC set to  0.000000
3/23/2011	2:22:16 PM	H2 MFC set to  0.000000
3/23/2011	2:22:16 PM	BCl3 MFC set to  0.000000
3/23/2011	2:22:16 PM	PHl3 MFC set to  0.000000
3/23/2011	2:22:16 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:22:16 PM	Tube furnace set to 0
3/23/2011	2:22:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/23/2011	2:22:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2011	2:22:19 PM	Recipe started at 2:22 PM
3/23/2011	2:22:19 PM	Helium valve closed
3/23/2011	2:22:19 PM	H2 valve closed
3/23/2011	2:22:19 PM	BCl3 valve closed
3/23/2011	2:22:19 PM	PH3 valve closed
3/23/2011	2:22:19 PM	SiCl4 pre valve closed
3/23/2011	2:22:19 PM	SiCl4 post valve closed
3/23/2011	2:22:19 PM	Main Vac valve closed
3/23/2011	2:22:19 PM	Bubbler valve closed
3/23/2011	2:22:19 PM	Bypass valve opened
3/23/2011	2:22:19 PM	Helium MFC set to  0.000000
3/23/2011	2:22:19 PM	H2 MFC set to  0.000000
3/23/2011	2:22:19 PM	BCl3 MFC set to  0.000000
3/23/2011	2:22:19 PM	PHl3 MFC set to  0.000000
3/23/2011	2:22:19 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:22:19 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:22:19 PM	Tube furnace set to 0
3/23/2011	2:22:19 PM	Helium valve closed
3/23/2011	2:22:19 PM	H2 valve closed
3/23/2011	2:22:19 PM	BCl3 valve closed
3/23/2011	2:22:19 PM	PH3 valve closed
3/23/2011	2:22:19 PM	SiCl4 pre valve closed
3/23/2011	2:22:19 PM	SiCl4 post valve closed
3/23/2011	2:22:19 PM	Bubbler valve closed
3/23/2011	2:22:19 PM	Main Vac valve opened
3/23/2011	2:22:19 PM	Bypass valve opened
3/23/2011	2:22:19 PM	Helium MFC set to  0.000000
3/23/2011	2:22:19 PM	H2 MFC set to  0.000000
3/23/2011	2:22:19 PM	BCl3 MFC set to  0.000000
3/23/2011	2:22:19 PM	PHl3 MFC set to  0.000000
3/23/2011	2:22:19 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:22:19 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:22:19 PM	Tube furnace set to 0
3/23/2011	2:22:20 PM	Run finished at 2:22 PM
3/23/2011	2:22:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2011	2:22:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/23/2011	2:22:34 PM	Recipe started at 2:22 PM
3/23/2011	2:22:34 PM	Helium valve closed
3/23/2011	2:22:34 PM	H2 valve closed
3/23/2011	2:22:34 PM	BCl3 valve closed
3/23/2011	2:22:34 PM	PH3 valve closed
3/23/2011	2:22:34 PM	SiCl4 pre valve closed
3/23/2011	2:22:34 PM	SiCl4 post valve closed
3/23/2011	2:22:34 PM	Main Vac valve closed
3/23/2011	2:22:34 PM	Bubbler valve closed
3/23/2011	2:22:34 PM	Bypass valve opened
3/23/2011	2:22:34 PM	Helium MFC set to  0.000000
3/23/2011	2:22:34 PM	H2 MFC set to  0.000000
3/23/2011	2:22:34 PM	BCl3 MFC set to  0.000000
3/23/2011	2:22:34 PM	PHl3 MFC set to  0.000000
3/23/2011	2:22:34 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:22:34 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:22:34 PM	Tube furnace set to 0
3/23/2011	2:22:35 PM	Helium valve closed
3/23/2011	2:22:35 PM	H2 valve closed
3/23/2011	2:22:35 PM	BCl3 valve closed
3/23/2011	2:22:35 PM	PH3 valve closed
3/23/2011	2:22:35 PM	SiCl4 pre valve closed
3/23/2011	2:22:35 PM	SiCl4 post valve closed
3/23/2011	2:22:35 PM	Bubbler valve closed
3/23/2011	2:22:35 PM	Main Vac valve opened
3/23/2011	2:22:35 PM	Bypass valve opened
3/23/2011	2:22:35 PM	Helium MFC set to  0.000000
3/23/2011	2:22:35 PM	H2 MFC set to  0.000000
3/23/2011	2:22:35 PM	BCl3 MFC set to  0.000000
3/23/2011	2:22:35 PM	PHl3 MFC set to  0.000000
3/23/2011	2:22:35 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:22:35 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:22:35 PM	Tube furnace set to 0
3/23/2011	2:23:35 PM	H2 valve closed
3/23/2011	2:23:35 PM	BCl3 valve closed
3/23/2011	2:23:35 PM	PH3 valve closed
3/23/2011	2:23:35 PM	SiCl4 pre valve closed
3/23/2011	2:23:35 PM	SiCl4 post valve closed
3/23/2011	2:23:35 PM	Bubbler valve closed
3/23/2011	2:23:35 PM	Helium valve opened
3/23/2011	2:23:35 PM	Main Vac valve opened
3/23/2011	2:23:35 PM	Bypass valve opened
3/23/2011	2:23:35 PM	Helium MFC set to  100.000000
3/23/2011	2:23:35 PM	H2 MFC set to  0.000000
3/23/2011	2:23:35 PM	BCl3 MFC set to  0.000000
3/23/2011	2:23:35 PM	PHl3 MFC set to  0.000000
3/23/2011	2:23:35 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:23:35 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:23:35 PM	Tube furnace set to 0
3/23/2011	2:24:35 PM	Helium valve closed
3/23/2011	2:24:35 PM	H2 valve closed
3/23/2011	2:24:35 PM	BCl3 valve closed
3/23/2011	2:24:35 PM	PH3 valve closed
3/23/2011	2:24:35 PM	SiCl4 pre valve closed
3/23/2011	2:24:35 PM	SiCl4 post valve closed
3/23/2011	2:24:35 PM	Bubbler valve closed
3/23/2011	2:24:35 PM	Main Vac valve opened
3/23/2011	2:24:35 PM	Bypass valve opened
3/23/2011	2:24:35 PM	Helium MFC set to  0.000000
3/23/2011	2:24:35 PM	H2 MFC set to  0.000000
3/23/2011	2:24:35 PM	BCl3 MFC set to  0.000000
3/23/2011	2:24:35 PM	PHl3 MFC set to  0.000000
3/23/2011	2:24:35 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:24:35 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:24:35 PM	Tube furnace set to 0
3/23/2011	2:25:35 PM	H2 valve closed
3/23/2011	2:25:35 PM	BCl3 valve closed
3/23/2011	2:25:35 PM	PH3 valve closed
3/23/2011	2:25:35 PM	SiCl4 pre valve closed
3/23/2011	2:25:35 PM	SiCl4 post valve closed
3/23/2011	2:25:35 PM	Bubbler valve closed
3/23/2011	2:25:35 PM	Helium valve opened
3/23/2011	2:25:35 PM	Main Vac valve opened
3/23/2011	2:25:35 PM	Bypass valve opened
3/23/2011	2:25:35 PM	Helium MFC set to  100.000000
3/23/2011	2:25:35 PM	H2 MFC set to  0.000000
3/23/2011	2:25:35 PM	BCl3 MFC set to  0.000000
3/23/2011	2:25:35 PM	PHl3 MFC set to  0.000000
3/23/2011	2:25:35 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:25:35 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:25:35 PM	Tube furnace set to 0
3/23/2011	2:26:36 PM	Helium valve closed
3/23/2011	2:26:36 PM	H2 valve closed
3/23/2011	2:26:36 PM	BCl3 valve closed
3/23/2011	2:26:36 PM	PH3 valve closed
3/23/2011	2:26:36 PM	SiCl4 pre valve closed
3/23/2011	2:26:36 PM	SiCl4 post valve closed
3/23/2011	2:26:36 PM	Bubbler valve closed
3/23/2011	2:26:36 PM	Main Vac valve opened
3/23/2011	2:26:36 PM	Bypass valve opened
3/23/2011	2:26:36 PM	Helium MFC set to  0.000000
3/23/2011	2:26:36 PM	H2 MFC set to  0.000000
3/23/2011	2:26:36 PM	BCl3 MFC set to  0.000000
3/23/2011	2:26:36 PM	PHl3 MFC set to  0.000000
3/23/2011	2:26:36 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:26:36 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:26:36 PM	Tube furnace set to 0
3/23/2011	2:27:36 PM	H2 valve closed
3/23/2011	2:27:36 PM	BCl3 valve closed
3/23/2011	2:27:36 PM	PH3 valve closed
3/23/2011	2:27:36 PM	SiCl4 pre valve closed
3/23/2011	2:27:36 PM	SiCl4 post valve closed
3/23/2011	2:27:36 PM	Bubbler valve closed
3/23/2011	2:27:36 PM	Helium valve opened
3/23/2011	2:27:36 PM	Main Vac valve opened
3/23/2011	2:27:36 PM	Bypass valve opened
3/23/2011	2:27:36 PM	Helium MFC set to  100.000000
3/23/2011	2:27:36 PM	H2 MFC set to  0.000000
3/23/2011	2:27:36 PM	BCl3 MFC set to  0.000000
3/23/2011	2:27:36 PM	PHl3 MFC set to  0.000000
3/23/2011	2:27:36 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:27:36 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:27:36 PM	Tube furnace set to 0
3/23/2011	2:28:36 PM	Helium valve closed
3/23/2011	2:28:36 PM	H2 valve closed
3/23/2011	2:28:36 PM	BCl3 valve closed
3/23/2011	2:28:36 PM	PH3 valve closed
3/23/2011	2:28:36 PM	SiCl4 pre valve closed
3/23/2011	2:28:36 PM	SiCl4 post valve closed
3/23/2011	2:28:36 PM	Bubbler valve closed
3/23/2011	2:28:36 PM	Main Vac valve opened
3/23/2011	2:28:36 PM	Bypass valve opened
3/23/2011	2:28:36 PM	Helium MFC set to  0.000000
3/23/2011	2:28:36 PM	H2 MFC set to  0.000000
3/23/2011	2:28:36 PM	BCl3 MFC set to  0.000000
3/23/2011	2:28:36 PM	PHl3 MFC set to  0.000000
3/23/2011	2:28:36 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:28:36 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:28:36 PM	Tube furnace set to 0
3/23/2011	2:29:36 PM	H2 valve closed
3/23/2011	2:29:36 PM	BCl3 valve closed
3/23/2011	2:29:36 PM	PH3 valve closed
3/23/2011	2:29:36 PM	SiCl4 pre valve closed
3/23/2011	2:29:36 PM	SiCl4 post valve closed
3/23/2011	2:29:36 PM	Bubbler valve closed
3/23/2011	2:29:36 PM	Helium valve opened
3/23/2011	2:29:36 PM	Main Vac valve opened
3/23/2011	2:29:36 PM	Bypass valve opened
3/23/2011	2:29:36 PM	Helium MFC set to  100.000000
3/23/2011	2:29:36 PM	H2 MFC set to  0.000000
3/23/2011	2:29:36 PM	BCl3 MFC set to  0.000000
3/23/2011	2:29:36 PM	PHl3 MFC set to  0.000000
3/23/2011	2:29:36 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:29:36 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:29:36 PM	Tube furnace set to 0
3/23/2011	2:30:36 PM	Helium valve closed
3/23/2011	2:30:36 PM	H2 valve closed
3/23/2011	2:30:36 PM	BCl3 valve closed
3/23/2011	2:30:36 PM	PH3 valve closed
3/23/2011	2:30:36 PM	SiCl4 pre valve closed
3/23/2011	2:30:36 PM	SiCl4 post valve closed
3/23/2011	2:30:36 PM	Bubbler valve closed
3/23/2011	2:30:36 PM	Main Vac valve opened
3/23/2011	2:30:36 PM	Bypass valve opened
3/23/2011	2:30:36 PM	Helium MFC set to  0.000000
3/23/2011	2:30:36 PM	H2 MFC set to  0.000000
3/23/2011	2:30:36 PM	BCl3 MFC set to  0.000000
3/23/2011	2:30:36 PM	PHl3 MFC set to  0.000000
3/23/2011	2:30:36 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:30:36 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:30:37 PM	Tube furnace set to 0
3/23/2011	2:31:37 PM	H2 valve closed
3/23/2011	2:31:37 PM	BCl3 valve closed
3/23/2011	2:31:37 PM	PH3 valve closed
3/23/2011	2:31:37 PM	SiCl4 pre valve closed
3/23/2011	2:31:37 PM	SiCl4 post valve closed
3/23/2011	2:31:37 PM	Bubbler valve closed
3/23/2011	2:31:37 PM	Helium valve opened
3/23/2011	2:31:37 PM	Main Vac valve opened
3/23/2011	2:31:37 PM	Bypass valve opened
3/23/2011	2:31:37 PM	Helium MFC set to  100.000000
3/23/2011	2:31:37 PM	H2 MFC set to  0.000000
3/23/2011	2:31:37 PM	BCl3 MFC set to  0.000000
3/23/2011	2:31:37 PM	PHl3 MFC set to  0.000000
3/23/2011	2:31:37 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:31:37 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:31:37 PM	Tube furnace set to 0
3/23/2011	2:32:37 PM	Helium valve closed
3/23/2011	2:32:37 PM	H2 valve closed
3/23/2011	2:32:37 PM	BCl3 valve closed
3/23/2011	2:32:37 PM	PH3 valve closed
3/23/2011	2:32:37 PM	SiCl4 pre valve closed
3/23/2011	2:32:37 PM	SiCl4 post valve closed
3/23/2011	2:32:37 PM	Bubbler valve closed
3/23/2011	2:32:37 PM	Main Vac valve opened
3/23/2011	2:32:37 PM	Bypass valve opened
3/23/2011	2:32:37 PM	Helium MFC set to  0.000000
3/23/2011	2:32:37 PM	H2 MFC set to  0.000000
3/23/2011	2:32:37 PM	BCl3 MFC set to  0.000000
3/23/2011	2:32:37 PM	PHl3 MFC set to  0.000000
3/23/2011	2:32:37 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:32:37 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:32:37 PM	Tube furnace set to 0
3/23/2011	2:33:37 PM	H2 valve closed
3/23/2011	2:33:37 PM	BCl3 valve closed
3/23/2011	2:33:37 PM	PH3 valve closed
3/23/2011	2:33:37 PM	SiCl4 pre valve closed
3/23/2011	2:33:37 PM	SiCl4 post valve closed
3/23/2011	2:33:37 PM	Bubbler valve closed
3/23/2011	2:33:37 PM	Helium valve opened
3/23/2011	2:33:37 PM	Main Vac valve opened
3/23/2011	2:33:37 PM	Bypass valve opened
3/23/2011	2:33:37 PM	Helium MFC set to  100.000000
3/23/2011	2:33:37 PM	H2 MFC set to  0.000000
3/23/2011	2:33:37 PM	BCl3 MFC set to  0.000000
3/23/2011	2:33:37 PM	PHl3 MFC set to  0.000000
3/23/2011	2:33:37 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:33:37 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:33:37 PM	Tube furnace set to 0
3/23/2011	2:34:37 PM	Helium valve closed
3/23/2011	2:34:37 PM	H2 valve closed
3/23/2011	2:34:37 PM	BCl3 valve closed
3/23/2011	2:34:37 PM	PH3 valve closed
3/23/2011	2:34:37 PM	SiCl4 pre valve closed
3/23/2011	2:34:37 PM	SiCl4 post valve closed
3/23/2011	2:34:37 PM	Bubbler valve closed
3/23/2011	2:34:37 PM	Main Vac valve opened
3/23/2011	2:34:37 PM	Bypass valve opened
3/23/2011	2:34:37 PM	Helium MFC set to  0.000000
3/23/2011	2:34:37 PM	H2 MFC set to  0.000000
3/23/2011	2:34:37 PM	BCl3 MFC set to  0.000000
3/23/2011	2:34:37 PM	PHl3 MFC set to  0.000000
3/23/2011	2:34:37 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:34:37 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:34:37 PM	Tube furnace set to 0
3/23/2011	2:35:37 PM	H2 valve closed
3/23/2011	2:35:37 PM	BCl3 valve closed
3/23/2011	2:35:37 PM	PH3 valve closed
3/23/2011	2:35:37 PM	SiCl4 pre valve closed
3/23/2011	2:35:37 PM	SiCl4 post valve closed
3/23/2011	2:35:37 PM	Bubbler valve closed
3/23/2011	2:35:37 PM	Helium valve opened
3/23/2011	2:35:37 PM	Main Vac valve opened
3/23/2011	2:35:37 PM	Bypass valve opened
3/23/2011	2:35:37 PM	Helium MFC set to  100.000000
3/23/2011	2:35:37 PM	H2 MFC set to  0.000000
3/23/2011	2:35:37 PM	BCl3 MFC set to  0.000000
3/23/2011	2:35:37 PM	PHl3 MFC set to  0.000000
3/23/2011	2:35:37 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:35:37 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:35:37 PM	Tube furnace set to 0
3/23/2011	2:36:38 PM	Helium valve closed
3/23/2011	2:36:38 PM	H2 valve closed
3/23/2011	2:36:38 PM	BCl3 valve closed
3/23/2011	2:36:38 PM	PH3 valve closed
3/23/2011	2:36:38 PM	SiCl4 pre valve closed
3/23/2011	2:36:38 PM	SiCl4 post valve closed
3/23/2011	2:36:38 PM	Bubbler valve closed
3/23/2011	2:36:38 PM	Main Vac valve opened
3/23/2011	2:36:38 PM	Bypass valve opened
3/23/2011	2:36:38 PM	Helium MFC set to  0.000000
3/23/2011	2:36:38 PM	H2 MFC set to  0.000000
3/23/2011	2:36:38 PM	BCl3 MFC set to  0.000000
3/23/2011	2:36:38 PM	PHl3 MFC set to  0.000000
3/23/2011	2:36:38 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:36:38 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:36:38 PM	Tube furnace set to 0
3/23/2011	2:37:38 PM	H2 valve closed
3/23/2011	2:37:38 PM	BCl3 valve closed
3/23/2011	2:37:38 PM	PH3 valve closed
3/23/2011	2:37:38 PM	SiCl4 pre valve closed
3/23/2011	2:37:38 PM	SiCl4 post valve closed
3/23/2011	2:37:38 PM	Bubbler valve closed
3/23/2011	2:37:38 PM	Helium valve opened
3/23/2011	2:37:38 PM	Main Vac valve opened
3/23/2011	2:37:38 PM	Bypass valve opened
3/23/2011	2:37:38 PM	Helium MFC set to  100.000000
3/23/2011	2:37:38 PM	H2 MFC set to  0.000000
3/23/2011	2:37:38 PM	BCl3 MFC set to  0.000000
3/23/2011	2:37:38 PM	PHl3 MFC set to  0.000000
3/23/2011	2:37:38 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:37:38 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:37:38 PM	Tube furnace set to 0
3/23/2011	2:38:38 PM	Helium valve closed
3/23/2011	2:38:38 PM	H2 valve closed
3/23/2011	2:38:38 PM	BCl3 valve closed
3/23/2011	2:38:38 PM	PH3 valve closed
3/23/2011	2:38:38 PM	SiCl4 pre valve closed
3/23/2011	2:38:38 PM	SiCl4 post valve closed
3/23/2011	2:38:38 PM	Bubbler valve closed
3/23/2011	2:38:38 PM	Main Vac valve opened
3/23/2011	2:38:38 PM	Bypass valve opened
3/23/2011	2:38:38 PM	Helium MFC set to  0.000000
3/23/2011	2:38:38 PM	H2 MFC set to  0.000000
3/23/2011	2:38:38 PM	BCl3 MFC set to  0.000000
3/23/2011	2:38:38 PM	PHl3 MFC set to  0.000000
3/23/2011	2:38:38 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:38:38 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:38:38 PM	Tube furnace set to 0
3/23/2011	2:39:38 PM	H2 valve closed
3/23/2011	2:39:38 PM	BCl3 valve closed
3/23/2011	2:39:38 PM	PH3 valve closed
3/23/2011	2:39:38 PM	SiCl4 pre valve closed
3/23/2011	2:39:38 PM	SiCl4 post valve closed
3/23/2011	2:39:38 PM	Bubbler valve closed
3/23/2011	2:39:38 PM	Helium valve opened
3/23/2011	2:39:38 PM	Main Vac valve opened
3/23/2011	2:39:38 PM	Bypass valve opened
3/23/2011	2:39:38 PM	Helium MFC set to  100.000000
3/23/2011	2:39:38 PM	H2 MFC set to  0.000000
3/23/2011	2:39:38 PM	BCl3 MFC set to  0.000000
3/23/2011	2:39:38 PM	PHl3 MFC set to  0.000000
3/23/2011	2:39:38 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:39:38 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:39:38 PM	Tube furnace set to 0
3/23/2011	2:40:38 PM	Helium valve closed
3/23/2011	2:40:38 PM	H2 valve closed
3/23/2011	2:40:38 PM	BCl3 valve closed
3/23/2011	2:40:38 PM	PH3 valve closed
3/23/2011	2:40:38 PM	SiCl4 pre valve closed
3/23/2011	2:40:38 PM	SiCl4 post valve closed
3/23/2011	2:40:38 PM	Bubbler valve closed
3/23/2011	2:40:38 PM	Main Vac valve opened
3/23/2011	2:40:38 PM	Bypass valve opened
3/23/2011	2:40:38 PM	Helium MFC set to  0.000000
3/23/2011	2:40:38 PM	H2 MFC set to  0.000000
3/23/2011	2:40:38 PM	BCl3 MFC set to  0.000000
3/23/2011	2:40:38 PM	PHl3 MFC set to  0.000000
3/23/2011	2:40:38 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:40:38 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:40:38 PM	Tube furnace set to 0
3/23/2011	2:41:38 PM	H2 valve closed
3/23/2011	2:41:38 PM	BCl3 valve closed
3/23/2011	2:41:38 PM	PH3 valve closed
3/23/2011	2:41:38 PM	SiCl4 pre valve closed
3/23/2011	2:41:38 PM	SiCl4 post valve closed
3/23/2011	2:41:38 PM	Bubbler valve closed
3/23/2011	2:41:38 PM	Helium valve opened
3/23/2011	2:41:39 PM	Main Vac valve opened
3/23/2011	2:41:39 PM	Bypass valve opened
3/23/2011	2:41:39 PM	Helium MFC set to  100.000000
3/23/2011	2:41:39 PM	H2 MFC set to  0.000000
3/23/2011	2:41:39 PM	BCl3 MFC set to  0.000000
3/23/2011	2:41:39 PM	PHl3 MFC set to  0.000000
3/23/2011	2:41:39 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:41:39 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:41:39 PM	Tube furnace set to 0
3/23/2011	2:42:39 PM	Helium valve closed
3/23/2011	2:42:39 PM	H2 valve closed
3/23/2011	2:42:39 PM	BCl3 valve closed
3/23/2011	2:42:39 PM	PH3 valve closed
3/23/2011	2:42:39 PM	SiCl4 pre valve closed
3/23/2011	2:42:39 PM	SiCl4 post valve closed
3/23/2011	2:42:39 PM	Bubbler valve closed
3/23/2011	2:42:39 PM	Main Vac valve opened
3/23/2011	2:42:39 PM	Bypass valve opened
3/23/2011	2:42:39 PM	Helium MFC set to  0.000000
3/23/2011	2:42:39 PM	H2 MFC set to  0.000000
3/23/2011	2:42:39 PM	BCl3 MFC set to  0.000000
3/23/2011	2:42:39 PM	PHl3 MFC set to  0.000000
3/23/2011	2:42:39 PM	SiCl4 MFC set to  0.000000
3/23/2011	2:42:39 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	2:42:39 PM	Tube furnace set to 0
3/23/2011	2:42:40 PM	Run finished at 2:42 PM
3/23/2011	2:42:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/23/2011	2:57:47 PM	Helium valve opened
3/23/2011	2:57:51 PM	Helium MFC set to  50.000000
3/23/2011	2:57:59 PM	Helium MFC set to  100.000000
3/23/2011	3:01:47 PM	Helium valve closed
3/23/2011	3:01:50 PM	Helium MFC set to  0.000000
3/23/2011	3:02:27 PM	Recipe started at 3:02 PM
3/23/2011	3:02:27 PM	Helium valve closed
3/23/2011	3:02:27 PM	BCl3 valve closed
3/23/2011	3:02:27 PM	PH3 valve closed
3/23/2011	3:02:27 PM	SiCl4 pre valve closed
3/23/2011	3:02:27 PM	SiCl4 post valve closed
3/23/2011	3:02:27 PM	Main Vac valve closed
3/23/2011	3:02:27 PM	Bypass valve closed
3/23/2011	3:02:27 PM	Bubbler valve closed
3/23/2011	3:02:27 PM	H2 valve opened
3/23/2011	3:02:27 PM	Helium MFC set to  0.000000
3/23/2011	3:02:27 PM	H2 MFC set to  500.000000
3/23/2011	3:02:27 PM	BCl3 MFC set to  0.000000
3/23/2011	3:02:27 PM	PHl3 MFC set to  0.000000
3/23/2011	3:02:27 PM	SiCl4 MFC set to  0.000000
3/23/2011	3:02:27 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	3:02:27 PM	Tube furnace set to 0
3/23/2011	3:03:47 PM	Helium valve closed
3/23/2011	3:03:47 PM	BCl3 valve closed
3/23/2011	3:03:47 PM	PH3 valve closed
3/23/2011	3:03:47 PM	SiCl4 pre valve closed
3/23/2011	3:03:47 PM	SiCl4 post valve closed
3/23/2011	3:03:47 PM	Main Vac valve closed
3/23/2011	3:03:47 PM	Bypass valve closed
3/23/2011	3:03:47 PM	H2 valve opened
3/23/2011	3:03:47 PM	Bubbler valve opened
3/23/2011	3:03:47 PM	Helium MFC set to  0.000000
3/23/2011	3:03:47 PM	H2 MFC set to  500.000000
3/23/2011	3:03:47 PM	BCl3 MFC set to  0.000000
3/23/2011	3:03:47 PM	PHl3 MFC set to  0.000000
3/23/2011	3:03:47 PM	SiCl4 MFC set to  0.000000
3/23/2011	3:03:47 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	3:03:47 PM	Tube furnace set to 1000
3/23/2011	3:23:47 PM	Helium valve closed
3/23/2011	3:23:47 PM	PH3 valve closed
3/23/2011	3:23:47 PM	Main Vac valve closed
3/23/2011	3:23:47 PM	Bypass valve closed
3/23/2011	3:23:47 PM	H2 valve opened
3/23/2011	3:23:47 PM	BCl3 valve opened
3/23/2011	3:23:47 PM	SiCl4 pre valve opened
3/23/2011	3:23:47 PM	SiCl4 post valve opened
3/23/2011	3:23:47 PM	Bubbler valve opened
3/23/2011	3:23:47 PM	Helium MFC set to  0.000000
3/23/2011	3:23:47 PM	H2 MFC set to  500.000000
3/23/2011	3:23:47 PM	BCl3 MFC set to  12.000000
3/23/2011	3:23:47 PM	PHl3 MFC set to  0.000000
3/23/2011	3:23:47 PM	SiCl4 MFC set to  50.000000
3/23/2011	3:23:47 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	3:23:47 PM	Tube furnace set to 1000
3/23/2011	3:43:47 PM	H2 valve closed
3/23/2011	3:43:47 PM	BCl3 valve closed
3/23/2011	3:43:47 PM	PH3 valve closed
3/23/2011	3:43:47 PM	SiCl4 pre valve closed
3/23/2011	3:43:47 PM	SiCl4 post valve closed
3/23/2011	3:43:47 PM	Main Vac valve closed
3/23/2011	3:43:47 PM	Bypass valve closed
3/23/2011	3:43:47 PM	Helium valve opened
3/23/2011	3:43:47 PM	Bubbler valve opened
3/23/2011	3:43:47 PM	Helium MFC set to  500.000000
3/23/2011	3:43:47 PM	H2 MFC set to  0.000000
3/23/2011	3:43:47 PM	BCl3 MFC set to  0.000000
3/23/2011	3:43:47 PM	PHl3 MFC set to  0.000000
3/23/2011	3:43:47 PM	SiCl4 MFC set to  0.000000
3/23/2011	3:43:47 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	3:43:47 PM	Tube furnace set to 0
3/23/2011	4:03:47 PM	Helium valve closed
3/23/2011	4:03:47 PM	H2 valve closed
3/23/2011	4:03:47 PM	BCl3 valve closed
3/23/2011	4:03:47 PM	PH3 valve closed
3/23/2011	4:03:47 PM	SiCl4 pre valve closed
3/23/2011	4:03:47 PM	SiCl4 post valve closed
3/23/2011	4:03:47 PM	Main Vac valve closed
3/23/2011	4:03:47 PM	Bypass valve closed
3/23/2011	4:03:47 PM	Bubbler valve closed
3/23/2011	4:03:47 PM	Helium MFC set to  0.000000
3/23/2011	4:03:47 PM	H2 MFC set to  0.000000
3/23/2011	4:03:47 PM	BCl3 MFC set to  0.000000
3/23/2011	4:03:47 PM	PHl3 MFC set to  0.000000
3/23/2011	4:03:47 PM	SiCl4 MFC set to  0.000000
3/23/2011	4:03:47 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	4:03:47 PM	Tube furnace set to 0
3/23/2011	4:03:48 PM	Run finished at 4:03 PM
3/23/2011	4:10:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2011	4:10:09 PM	Recipe started at 4:10 PM
3/23/2011	4:10:09 PM	Helium valve closed
3/23/2011	4:10:09 PM	H2 valve closed
3/23/2011	4:10:09 PM	BCl3 valve closed
3/23/2011	4:10:09 PM	PH3 valve closed
3/23/2011	4:10:09 PM	SiCl4 pre valve closed
3/23/2011	4:10:09 PM	SiCl4 post valve closed
3/23/2011	4:10:09 PM	Main Vac valve closed
3/23/2011	4:10:09 PM	Bubbler valve closed
3/23/2011	4:10:09 PM	Bypass valve opened
3/23/2011	4:10:09 PM	Helium MFC set to  0.000000
3/23/2011	4:10:09 PM	H2 MFC set to  0.000000
3/23/2011	4:10:09 PM	BCl3 MFC set to  0.000000
3/23/2011	4:10:09 PM	PHl3 MFC set to  0.000000
3/23/2011	4:10:09 PM	SiCl4 MFC set to  0.000000
3/23/2011	4:10:09 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	4:10:09 PM	Tube furnace set to 0
3/23/2011	4:10:40 PM	Helium valve closed
3/23/2011	4:10:40 PM	H2 valve closed
3/23/2011	4:10:40 PM	BCl3 valve closed
3/23/2011	4:10:40 PM	PH3 valve closed
3/23/2011	4:10:40 PM	SiCl4 pre valve closed
3/23/2011	4:10:40 PM	SiCl4 post valve closed
3/23/2011	4:10:40 PM	Bubbler valve closed
3/23/2011	4:10:40 PM	Main Vac valve opened
3/23/2011	4:10:40 PM	Bypass valve opened
3/23/2011	4:10:40 PM	Helium MFC set to  0.000000
3/23/2011	4:10:40 PM	H2 MFC set to  0.000000
3/23/2011	4:10:40 PM	BCl3 MFC set to  0.000000
3/23/2011	4:10:40 PM	PHl3 MFC set to  0.000000
3/23/2011	4:10:40 PM	SiCl4 MFC set to  0.000000
3/23/2011	4:10:40 PM	Bypass solenoid MFC set to  0.000000
3/23/2011	4:10:40 PM	Tube furnace set to 0
3/23/2011	4:10:40 PM	Run finished at 4:10 PM
3/23/2011	4:10:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
